采用sol-gel法在Pt/Ti/SiO2/Si衬底上制备了Sn掺杂Ba(Zr0.2 Ti0.8)O3 (BZT)薄膜.结果表明,掺锡的BZT薄膜为钙钛矿结构,当Sn掺量超过4％时,出现了第二相BaO；SEM观察发现掺锡BZT薄膜表面光滑平整,孔洞和裂纹较少；当Sn掺量达到8％时,BZT薄膜的介电常数达到最大值,而介电损耗最小；BZT薄膜的剩余极化强度为2.29μC/cm2,矫顽场强为10.36kV/cm.
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