介绍了利用磁控溅射和一种液氮冷却装置,制备非晶态WO3薄膜、非晶态LiNbO3薄膜和纳米微晶态NiOx薄膜的有效方法.进而,使用这种液氮冷却装置,采用全程基片冷却方法,制备了单基片无机全固态智能窗--G│ITO│NiOx│LiNbO3│WO3│ITO器件.实验结果表明,在400～800nm的可见光范围内,该器件经过1000次循环后,它的漂白态透射率为63.0%,而着色态透射率为10.6%,这一初步工作表明,基片冷却方法应该是制备有优异性能的无机全固态电致变色智能窗的有效方法.
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