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  4. 掺铝氧化锌透明导电膜的研究进展

材料导报, 2010, 24(19): 126-131.

掺铝氧化锌透明导电膜的研究进展

刘超英 1, , 左岩 2, , 许杰 3,

1.中国建筑材料科学研究总院玻璃科学研究所,北京,100024

2.中国建筑材料科学研究总院玻璃科学研究所,北京,100024

3.中国建筑材料科学研究总院玻璃科学研究所,北京,100024

基金项目:   科研院所技术开发研究专项资金(2009EG232255)  

关键词： 透明导电膜 , 薄膜结构 , 光电特性 , 禁带宽度 , 玻璃基片

Research Progress of Transparent Conductive Aluminum-doped Zinc Oxide Films

掺铝氧化锌(AZO)透明导电薄膜作为一种性能优异的多功能材料引起了研究人员的普遍关注,被认为是当前极具发展潜力的传统铟锡氧化物(ITO)薄膜的替代者.综述了AZO薄膜的不同制备工艺,并叙述了衬底温度、Al掺杂量、氧分压、退火条件、同质缓冲层5个因素对薄膜的结构以及光电性能的影响.针对AZO透明导电薄膜的研究现状,提出了今后的研究方向:理论与经验相结合,优化工艺设备,在提高薄膜透光率的同时进一步降低其表面电阻和制造成本,并不断开拓AZO薄膜新的应用领域.

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