采用浸渍提拉法工艺在印制有金电极的Al2O3基片上制备了TiO2薄膜,并对不同厚度及工作温度下TiO2薄膜的气敏性能作了研究.结果显示,当TiO2气敏薄膜的工作温度一定时,存在一个最佳厚度,在该厚度下TiO2薄膜对H2具有最佳的气敏响应;当TiO2薄膜的厚度一定时,TiO2薄膜存在一个最佳工作温度,在该温度下TiO2薄膜对H2的气敏响应最为灵敏.XPS测试表明,TiO2薄膜经过H2氛围后,薄膜中吸附氧含量降低.利用TiO2薄膜表面吸附氧与H2的反应、薄膜对H2的吸附与脱附理论、电子的迁移等过程较为合理地解释了TiO2薄膜对H2的气敏响应.
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