采用非平衡磁控溅射离子镀技术在不同衬底上制备了不同铬含量的掺铬类石墨非晶碳膜;用X射线光电子能谱仪、扫描电子显微镜、高分辨透射电子显微镜和拉曼光谱仪等分析了碳膜的成分、表面形貌、显微组织和碳键结构;通过销-盘摩擦试验机测试了碳膜在干摩擦及不同润滑条件下的摩擦因数.结果表明:适量掺铬碳膜可保持纯碳膜均一、无结晶的显微组织;掺铬对碳膜中碳元素的价键结构产生了重要影响,随着铬含量的增大,sp2碳原子在碳膜中的含量先增大后减小,使得掺铬碳膜的sp2碳含量比纯碳膜的更高;适量掺铬能有效降低碳膜的摩擦因数,而掺铬碳膜的摩擦因数随着铬含量增大的变化趋势与碳膜的碳键结构变化明显相关.
参考文献
| [1] | B.K.Tay;D.Sheeja;L.J.Yu .On stress reduction of tetrahedral amorphous carbon films for moving mechanical assemblies[J].Diamond and Related Materials,2003(2):185-194. |
| [2] | Weissmantel S;Reisse G;Rost D .Preparation of superhard amorphous carbon films with low internal stress[J].Surface & Coatings Technology,2004(0):268-273. |
| [3] | Zhang YB;Lau SP;Sheeja D;Tay BK .Study of mechanical properties and stress of tetrahedral amorphous carbon films prepared by pulse biasing[J].Surface & Coatings Technology,2005(2/3):338-343. |
| [4] | F. C. Marques;R. G. Lacerda;C. Y. Odo;C. M. Lepienski .On the hardness of a-C:H films prepared by methane plasma decomposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1998(1/2):113-117. |
| [5] | D. Camino;A. H. S. Jones;D. Mercs;D. G. Teer .High performance sputtered carbon coatings for wear resistant applications[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,1999(1/2):125-131. |
| [6] | V. Fox;A. Jones;N. M. Renevier;D. G. Teer .Hard lubricating coatings for cutting and forming tools and mechanical components[J].Surface & Coatings Technology,2000(1/3):347-353. |
| [7] | V. Singh;J.C. Jiang;E.I. Meletis .Cr-diamondlike carbon nanocomposite films: Synthesis, characterization and properties[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2005(1/2):150-158. |
| [8] | Hovsepian PE.;Lewis DB.;Constable C.;Luo Q.;Kok YN.;Munz WD. .Combined steered cathodic arc/unbalanced magnetron grown C/Cr nanoscale multilayer coatings for tribological applications[J].Surface & Coatings Technology,2003(0):762-769. |
| [9] | Sheeja D.;Tay BK.;Sun CQ.;Fu YQ. .Characterization of Ti-containing amorphous carbon films prepared on titanium substrates[J].Journal of Materials Science,2003(3):421-425. |
| [10] | Ai-Ying Wang;Kwang-Ryeol Lee;Jae-Pyoung Ahn .Structure and mechanical properties of W incorporated diamond-like carbon films prepared by a hybrid ion beam deposition technique[J].Carbon: An International Journal Sponsored by the American Carbon Society,2006(9):1826-1832. |
| [11] | S. Yang;D. G. Teer .Investigation of sputtered carbon and carbon/chromium multi-layered coatings[J].Surface & Coatings Technology,2000(1/3):412-416. |
| [12] | Yang S.;Renevier NM.;Teer DG.;Li X. .Tribological properties and wear mechanism of sputtered C/Cr coating[J].Surface & Coatings Technology,2001(0):85-93. |
| [13] | Teer DG. .New solid lubricant coatings[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,2001(2):1068-1074. |
| [14] | Sunil K. Pal;Jiechao Jiang;Efstathios I. Meletis .Effects of N-doping on the microstructure, mechanical and tribological behavior of Cr-DLC films[J].Surface & Coatings Technology,2007(18):7917-7923. |
| [15] | Kok, YN;Hovsepian, PE;Haasch, R;Petrov, I .Raman spectroscopy study of C/Cr coatings deposited by the combined[J].Surface & Coatings Technology,2005(1/4):1117-1122. |
| [16] | Wang DY;Chang YY;Chang CL;Huang YW .Deposition of diamond-like carbon films containing metal elements on biomedical Ti alloys[J].Surface & Coatings Technology,2005(7):2175-2180. |
| [17] | Tay BK.;Tan HS.;Yang HS.;Sun Z.;Shi X. .Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc[J].Surface & Coatings Technology,1998(1/2):155-158. |
| [18] | Hyun S. Myung;Yong S. Park;Min J. Jung .Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering[J].Materials Letters,2004(9):1513-1516. |
| [19] | Gassner, G;Mayrhofer, PH;Mitterer, C;Kiefer, J .Structure-property relations in Cr-C/a-C : H coatings deposited by reactive magnetron sputtering[J].Surface & Coatings Technology,2005(1/4):1147-1150. |
| [20] | 张永宏,马婕,蒋百灵.Cr含量对类石墨碳涂层硬度及其价键结构的影响[J].材料热处理学报,2007(04):106-110. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%