以钛酸的纳米单片层为前驱体,采用电泳沉积法在Pt极板上制备择优取向钛酸薄膜,并通过热处理使其转换成TiO2薄膜.考察了悬浮介质和沉积电压对钛酸薄膜形貌及结构的影响,通过XRD、SEM对薄膜进行了表征.结果表明:在乙醇:水为1:1的悬浮介质中沉积制得的钛酸薄膜均匀、平整、致密,具有很强的b轴取向;薄膜的厚度随电压的升高而增厚;经500 ℃热处理后,钛酸薄膜转变成具有(101)择优取向的锐钛矿相结构的TiO2薄膜,颗粒尺寸分布均匀,平均粒度约40 nm.
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