应用超显微硬度计测定１Ｃｒ１８Ｎｉ９Ｔｉ奥氏体不锈钢氮离子注入层的硬度，并用Ａｕｇｅｒ电子能谱仪（ＡＥＳ）及高精度轮廓仪测定氮离子注入层氮浓度分布及深度．结果表明：在９０ｋｅＶ，３ｘ１０~１７Ｎ＋／ｃｍ~２注入时．共注入层深度为０．１８μｍ、用１ｍＮ载荷侧得本征硬度ＨＶ为３．４７ＧＰａ，比非注入态表面硬度提高三倍之多，合理的试验载荷应≤ｌｍＮ（０．１ｇ）．
An ultra-microhardness tester typed UMHT-3 was used to measure the characteristic hardness of N+ implanted layer on 1Cr18Ni9Ti stainless steel.Depth and nitrogen concentration profile of the N+ implanted layer were determined by means of AES in combination with high precision profilometer. The depth of N+ implanted layer in 1Cr18Ni9Ti steel is 0.18μm at 90 keV and 3ｘ10~17 N+/cm2. Its characteristic hardness,HV 3.47 GPa under load of l mN, shows that N+ implantation can increase the surface hardness by more than 3 times. The appropriate testing load selected should be equal or less than l mN.
参考文献
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| [2] | JonssonB,HogmarkS．ThinSolidFilms,1984:114:2572OnateJC,DennisJK,HamiltonS．HeatTreatMet．1987 |
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