铁电钛酸锶钡(BSTO)薄膜具备十分优越的铁电/介电性能,在可调谐微波器件和动态随机存储器(DRAM)方面显示出十分诱人的应用前景.而YBa2Cu3O-δ(YBCO)高温超导薄膜作为其电极引入,明显降低了微波损耗,能够大大优化器件的性能.本文针对微波器件性能要求对比了各种常用基片的性能参数,描述了目前BSTO薄膜与BSTO/YBCO异质薄膜制备中存在的问题以及薄膜介电性能测试表征方法.利用脉冲激光沉积(PLD)技术成功制备出结构完整和质量较高的Ba0.5Sr0.5TiO3薄膜.同时,在1.2°斜切LaAlO3基片上研制有Ba0.1Sr0.9TiO3/YBa2Cu3O7-δ异质双层膜,在1MHz频率、77K温度条件下,其介电常数为1200,介电损耗为0.0045,±30V直流偏压时可调性达到60%,在液氮温度下表现出良好的应用前景.
参考文献
| [1] | Chen C L;Feng H H;Zhang Z et al.[J].Applied Physics Letters,1999,75(03):412-414. |
| [2] | Kingon Angus I;Maria J P;Streiffer S K .[J].Nature,2000,406:1032-1038. |
| [3] | Park S O;Hwang C S;Cho H J et al.[J].Japanese Journal of Applied Physics,1996(35):1548-1552. |
| [4] | Chen C L;Miranda F A;Jiang J C et al.[J].Applied Physics Letters,2001,78(05):652-654. |
| [5] | Carlson CM.;Parilla PA.;Perkins JD.;Ginley DS.;Kozyrev AB. Oshadchy VN.;Pavlov AS.;Rivkin TV. .Large dielectric constant (epsilon/epsilon(0)> 6000) Ba0.4Sr0.6TiO3 thin films for high-performance microwave phase shifters[J].Applied physics letters,2000(14):1920-1922. |
| [6] | Boikov YA.;Claeson T. .HIGH TUNABILITY OF THE PERMITTIVITY OF YBA2CU3O7-DELTA/SRTIO3 HETEROSTRUCTURES ON SAPPHIRE SUBSTRATES[J].Journal of Applied Physics,1997(7):3232-3236. |
| [7] | Gim Y;Hudson T;Fan Y et al.[J].Applied Physics Letters,2000,77(08):1200-1202. |
| [8] | Li Lin .[J].Materials Science and Engineering R:Reports,2000,29(06):153-181. |
| [9] | 李林.高温超导薄膜无源微波器件的应用[J].物理,2001(07):392-397. |
| [10] | 张其瑞.高温超导电性[M].杭州:浙江大学出版社,1994 |
| [11] | Wang F;Wardenweber R .Films[J].THIN SOLID FILMS,1993,227:200-204. |
| [12] | Hyun S;Lee J H;Kim S S et al.[J].Applied Physics Letters,2000,77(19):3084-3086. |
| [13] | ShawTM;SuoS;HuangM et al.[J].Applied Physics Letters,1999,75(14):2129-2131. |
| [14] | Pertsev NA.;Tagantsev AK.;Zembilgotov AG. .Effect of mechanical boundary conditions on phase diagrams of epitaxial ferroelectric thin films[J].Physical review letters,1998(9):1988-1991. |
| [15] | Taylor T R;Hansen P J;Acikel B et al.[J].Applied Physics Letters,2002,80(11):1978-1979. |
| [16] | Vendik O G;Ter-Martirosyan L T;Dedyk A I et al.[J].Ferroelectrics,1993,144:33-43. |
| [17] | Gerber C;Anselmetti D;Bednorz J G et al.[J].NATURE,1991,350(6316):279-280. |
| [18] | Cao L X;Xu Y;Zhao B R et al.[J].PHYSICA C,1996,266:143-148. |
| [19] | Jin O.;Li L.;Zhao BR.;Liu W. .Microstructural features of Pb(ZrxTi1-x)O-3/YBa2Cu3O7-x/SrTiO3 heterostructure[J].Journal of Materials Science Letters,1998(19):1645-1647. |
| [20] | Gao J;Tang W H;Chui T C .C[J].PHYSICA C,2000,330:33-38. |
| [21] | Gao J;Lian G J;Xiong G C .C[J].Physics C,2000,330:160-164. |
| [22] | Tang W H;Gao J;Liu C X et al.[J].Journal of Materials Research,2001,16(10):2864-2868. |
| [23] | Lippmaa M;Nakagawa N;Ohashi S et al.[J].Applied Physics Letters,1999,74(23):3543-3545. |
| [24] | Hu Wen-fei;Zhao Xin-jie;Peng Wei et al.[J].Journal of Crystal Growth,2001,231:493-497. |
| [25] | Hu Wen-fei;Li Lin;Zhao Xin jie et al.[J].中国物理快报(英文版),2001,18(03):91-93. |
| [26] | Baumert BA.;Matsuda AT.;Tsai TL.;Tracy CJ.;Gregory RB. Fejes PL.;Cave NG.;Taylor DJ.;Otsuki T.;Fujii E.;Hayashi S.;Suu K.;Chang LH. .CHARACTERIZATION OF SPUTTERED BARIUM STRONTIUM TITANATE AND STRONTIUM TITANATE THIN FILMS[J].Journal of Applied Physics,1997(5):2558-2566. |
| [27] | Kuroiwa T;Tsunemine Y;Horikawa T et al.[J].Japanese Journal of Applied Physics,1994(33):5187-5197. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%