采用酸催化法、碱催化法和酸碱复合催化法制备了SiO2溶胶,进而制得SiO2减反膜.表征了薄膜的表面形貌,测定了薄膜的透射率和硬度.结果表明,不同催化溶胶制得的膜层在表面形貌、减反效果和薄膜硬度等方面存在明显差异:酸催化得到的薄膜,孔隙率和透过率最低,但硬度和抗划伤性最好；碱催化得到的薄膜,孔隙率和透过率最高,但硬度和抗划伤性最差；酸碱复合催化得到的薄膜,孔隙率、透过率、硬度和抗划伤性能介于以上二者之间,性能与酸碱复合催化溶胶的制备工艺密切相关.
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