本文采用光助溶胶-凝胶法制备了掺铝氧化锌(AZO)透明导电薄膜.研究了紫外光照射对薄膜导电性和透光性质的影响.结果表明:光照使薄膜的导电性显著提高,且光照后薄膜方阻的降低幅度随薄膜晶粒尺寸的减小而逐渐增加;而随着紫外光照射时间延长,薄膜的紫外吸收边蓝移,近红外区透光率降低.以上实验现象可能与表面吸附氧解吸引起的载流子浓度增加、迁移率升高以及分层退火处理形成的薄膜结构有关.
Transparent conducting aluminum-doped zinc oxide (AZO) thin films were prepared by the UV light-assisted sol-gel method in this paper. The effects of UV light irradiation on conductive and transmittance properties of the AZO films were further studied. It is demonstrated that the conductivity of the AZO films is increased markedly by UV light irradiation, and the ratio of sheet resistance before and after irradiation increases with decreasing the microcrystal size in the film. Further more, the UV absorption edge shifts towards shorter wavelength and the NIR transmission decreases with prolonging the UV irradiation. These experimental phenomena are attributed to the surface oxygen desorption which lead to the increase in the carrier concentration and in mobility of carriers and the layer-annealing structure of the AZO film.
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