研究了多孔氧化铝薄膜的制备工艺以及影响其成孔效果的主要因素.采用分步阳极氧化的方法和适当的工艺步骤获得了孔洞分布均匀、孔径一致且耐水合的多孔氧化膜,此类氧化薄膜在经过后续的特殊处理后可以用于制备湿度传感器和AAO薄膜.
参考文献
| [1] | Keller F;Hunter M S .Structural features of oxide coatings on aluminum[J].Journal of the Electrochemical Society,1953,100(09):411. |
| [2] | Sui Yucheng;Saniger J M .Characterization of anodic porous alumina by AFM[J].Materials Letters,2001,48(3-4):127. |
| [3] | Whitesides G M;Grzybowski B .Self-assembly at all scales[J].Science,2002,295(5564):2418. |
| [4] | Davis M E .Ordered porous materials for emerging applications[J].Nature,2002,417(6891):813. |
| [5] | Xia Y N et al.Unconventional methods for fabricating and patterning nanostructures[J].Chemical Reviews,1999,99(07):1823. |
| [6] | Diggle J W;Downie T C;Gouding C W .Anodic oxide film on aluminum[J].Chemical Reviews,1969,69(03):365. |
| [7] | 孙小华,邹隽,胡宗智,吴敏.制备多孔氧化铝的影响因素研究[J].三峡大学学报（自然科学版）,2009(02):79-81. |
| [8] | Masuda H;Fukuda K .ORDERED METAL NANOHOLE ARRAYS MADE BY A TWO-STEP REPLICATION OF HONEYCOMB STRUCTURES OF ANODIC ALUMINA[J].Science,1995(5216):1466-1468. |
| [9] | Masuda H;Satoh M .Fabrication of gold nanodot array using anodic porous alumina as an evaporation mask[J].Japanese Journal of Applied Physics,1996,35:126. |
| [10] | 胡迪,白安琪,成步文,王启明.超薄阳极氧化铝模版的制备[J].微细加工技术,2008(05):12-15. |
| [11] | 李晓洁,张海明,胡国锋,李育洁.AAO模板的制备及其应用[J].材料导报,2008(Z2):80-82,95. |
| [12] | Allen Bai;Chi-Chang Hu;Yong-Feng Yang;Chi-Cheng Lin .Pore diameter control of anodic aluminum oxide with ordered array of nanopores[J].Electrochimica Acta,2008(5):2258-2264. |
| [13] | 任豪,章佩娴.多孔Al2O3湿度传感器的湿敏电容理论模型[J].传感器技术,1999(04):11. |
| [14] | 吴海霞,王占和,李印增.多孔Al2O3薄膜的研制[J].传感器技术,2003(02):11-13. |
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