Room temperature ageing and high temperature annealing were conducted to study the restructuring of the ion induced fractal aggregates on Co-Yb alloy thin films. The evolution of the nonequilibrium fractals towards equilibrium compact clusters was observed by tracing the microstructure change under transmission electron microscopy examination. The fractal aggregates restructured and eventually turned into an equilibrium morphology of Yb particles distributing uniformly on the film surfaces.
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