薄膜材料的应用范围越来越广泛,薄膜材料的界面结合能对其使用过程具有重要影响.鼓包法是测量薄膜材料界面结合能的一种重要的方法.通过有限元软件ABAQUS模拟鼓包实验,并用ABAQUS中的内聚力模型表征薄膜与基底之间的界面性能,最终得到薄膜材料的界面结合能.计算结果表明:薄膜开裂时的压强和挠度的乘积与界面结合能呈线性关系,且斜率随鼓包模型的孔径变化而变化.通过不同孔径下的模拟最后得到Ni薄膜界面结合能的表达式,且表达式中的参数在实验过程中简单易测.
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