以铟锡氯化物为原料,采用水热法在玻璃基片上制备了氧化铟锡(ITO)薄膜,并利用X射线衍射(XRD)、能谱分析(EDS)、扫描电子显微镜(SEM)等手段对薄膜的相结构、化学组成及形貌进行了表征,研究了水热温度和时间等条件对ITO薄膜光吸收特性的影响.结果表明,水热法制备的ITO薄膜呈体心立方多晶结构且均匀、致密.薄膜在可见光区透射比可达98.2%,具备低成本大规模制备ITO薄膜的潜力.
参考文献
| [1] | Lippens P;Segers A J .Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings[J].Thin Solid Films,1998,317(01):405. |
| [2] | Douglas M Mattox .Sol-gel derived air-baked indium and tin oxide films[J].Thin Solid Films,1991,204(01):25. |
| [3] | Toshiro Maruyama;Kunihiro Fukui .Indium tin oxide thin films prepared by chemical vapour deposition[J].Thin Solid Films,1991,203(02):297. |
| [4] | Vasu V;Subrahmanyam A .Reaction kinetics of the formation of indium tin oxide films grown by spray pyrolysis[J].Thin Solid Films,1990,193(01):696. |
| [5] | 黄晖,苗鸿雁,罗宏杰,姚熹.水热法制备薄膜技术[J].硅酸盐通报,2002(06):58-62. |
| [6] | Chen Qianwang;Qian Yitai;Chen Zuyao .Hydrothermal preparation of highly oriented TiO2 thin films on silicon[J].Applied Physics Letters,1995,66(13):1608. |
| [7] | Chen Qianwang;Qian Yitai;Li Xiaoguang .Hydrothermal deposition and characterization of ultrafine ZrO2 thin films[J].Nanostructured Materials,1996,7(04):467. |
| [8] | K.Yanagisawa;C.P.Udawatte .Preparation and characterization of fine indium tin oxide powders by a hydrothermal treatment and postannealing method[J].Journal of Materials Research,2000(6):1404-1408. |
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