采用溶胶-凝胶法，通过调整溶剂、溶胶稳定剂和热处理制度在载波片上制备出不同工艺参数的ZnO薄膜。利用X射线衍射（XRD）和扫描电镜（SEM）考察了ZnO薄膜的晶体结构和表面形貌。实验结果表明：采用高沸点溶剂时ZnO薄膜择优取向更强；单乙醇胺为稳定剂时ZnO薄膜择优取向很强，而二乙醇胺或三乙醇胺为稳定剂时择优取向很微弱；预处理温度高于ZnO凝胶膜晶化开始温度时择优取向将减弱；最终处理温度在500℃以下时，随温度提高，晶粒尺寸越大，择优取向越强。
ZnO films have been prepared on glass by sol-gel dip coating. The crystal structure and surface morphology were characterized by X -ray diffractometer and scanning electron microscope, respectively. It could be concluded: solvent with higher boiling point helped to obtain ZnO with stronger preferred orientation; MEA was quite effective in formation of ZnO films with strong orientation, while DEA and TEA were not; pretreatment should be finished before the beginning of the crystallization of ZnO gel film; postreatment at higher temperature induced bigger grain size and stronger preferred orientation at 400 - 500℃.
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