利用复合结构原理,研制出“硼硅玻璃＋α－石英＋硅酸锌”系低烧低介陶瓷材料,利用ＸＲＤ、ＨＰ４１９４频谱仪、ＳＥＭ分析了该材料的晶相组成、介电性能及显微结构．结果表明:在高频下,该材料具有很低的介电常数(Ｋ＝４~５,１ＭＨｚ)和很低的介电损耗(ｔａｎδ＜０．００１,１ＭＨｚ);同时能在低于９００℃温度下烧结．该材料是一种理想的适用于高频(１ＧＨｚ以上)多层片式电感(ＭＬＣＩｓ)元件用的介质材料．同时得出:在该组成中,硼硅玻璃重烧结的过程中有方石英析出;少量硅酸锌由于锌离子进入玻璃中而转变为亚硅酸锌;硅酸锌在该组成中有助烧结的作用,该材料介电性能随频率的变化与德拜方程的描述基本吻合．
The low temperature sintering and low dielectric properties ceramic materials of “borosilicate glass+
alpha-quartz+zinc silicate” system were prepared by applying the principle of the componund structure. The crystal phases, dielectric properties and
microstructure of the all sintering samples were analyzed by X-ray diffraction (XRD), HP4194ALCR analyzer and scanning electron microscopy
(SEM) respectively. The results show these materials possess very low dielectric constant (K=4～5, 1MHz)and very low dissipation factor
(tanδ<0. 001, 1MHz)in high frequencies. And they can be sintered below 900℃. These materials are promising dielectric materials
for high frequencies(≥1GHz) mulitlayer chip inductors (MLCIs). In the mean while, new crystalline phase of cristobalite is formed during
re-sintering the borosilicate glass and ZnSiO_3 phase is formed from zinc silicate visa zinc ions melting into the glass net. Zinc silicate
phase is of an aid-sintering function. The changes of dielectric properties of the samples with frequencies are fit with Debye equation.
参考文献
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