TiNi基形状记忆合金薄膜研究进展

材料导报, 2006, 20(2): 118-125.

TiNi基形状记忆合金薄膜研究进展

宁智华 ^1, , 王治国 ^2, , 傅永庆 ^3, , 祖小涛 ^4,

1.电子科技大学应用物理系,成都,610054

2.电子科技大学应用物理系,成都,610054

3.Department of Engineering,University of Cambridge,Cambridge UK

4.电子科技大学应用物理系,成都,610054

基金项目: 中国科学院资助项目(10175042) 教育部新世纪优秀人才支持计划

关键词： TiNi基形状记忆合金 , 薄膜 , 制备 , 微驱动器

Advances of Investigation on TiNi-based Shape Memory Alloy Films

TiNi基形状记忆合金薄膜除具有和体材料相同的形状记忆特性外,还因表面积大、散热能力好,改善了体材料响应速度较慢的缺点,在微电子机械系统领域是一种具有广阔应用前景的材料.综述了近年来TiNi基形状记忆合金薄膜研究现状,并对其应用进行了评述.

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材料期刊网

TiNi基形状记忆合金薄膜研究进展

Advances of Investigation on TiNi-based Shape Memory Alloy Films

参考文献