高温超导氧化物YBCO外延薄膜在掺入少量锆酸钡(BaZrO3,BZO)后,其超导性能会得到较大幅度的提高.研究了不同衬底温度对掺BZO的YBCO薄膜的外延特性及超导性能的影响.以固相反应法制备了YBCO及BZO原材料,利用固相烧结工艺制备了BZO含量为2%(质量分数)的YBCO-BZO复合靶材,采用脉冲激光沉积技术(PLD)在LaAlO3(100)基片上外延生长YBCO薄膜.以不同的衬底温度制备了YBCO薄膜,用X射线衍射和高分辨透射电子显微技术对所制备的YBCO薄膜的外延特性进行了分析.最后比较了在不同衬底温度下制备的YBCO薄膜的超导性能,得到了最佳衬底温度.
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