以HEDTA(N-β-羟乙基乙二胺三乙酸)为主配位剂,通过极化曲线测量、电感耦合等离子体发射光谱、表面形貌分析和X射线衍射谱分析等技术研究了甲基磺酸盐镀液中HEDTA含量对Sn-Ag-Cu三元合金共沉积的影响.镀液的基础组成和工艺条件为:Sn(CH3SO3)2 0.18 mol/L,Ag2O 0.006 mol/L,Cu(CH3SO3)2 0.001 2 mol/L,硫脲0.06 mol/L,烷基糖苷(APG)1 g/L,pH 4.0 ～ 6.0,温度25℃,电流密度7 mA/cm2,时间30 min.结果表明,随镀液中HEDTA含量的增加,Sn-Ag-Cu的沉积电位负移；但n(HEDTA)∶[Sn (Ⅱ)]大于2.2∶1.0时,HEDTA才可满足一定的配位要求,使沉积电位产生足够大的负移.镀液中HEDTA含量为0.6 ～ 1.2 mol/L,即n(HEDTA)∶n[Sn (Ⅱ)]为(3.3 ～ 6.7)∶1.0时,HEDTA的含量对镀层组成影响不大,所得Sn-Ag-Cu合金镀层结晶细致,表面平整、均匀,主要由Sn、Ag3Sn和Cu6Sn5组成.此外,随镀液中HEDTA含量的变化,镀层的结晶取向发生变化.
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