SrTiO3(111)衬底上KTa0.65Nb0.35O3薄膜的取向生长研究

无机材料学报, 1997, 12(6): 819-824.

SrTiO₃(111)衬底上KTa_0.65Nb_0.35O₃薄膜的取向生长研究

王世敏 , 王龙海 , 张刚升 , 赵建洪 , 张端明 , 李佐宜 , 章天金

湖北大学化学与材料科学学院

武汉430062

武汉430074>

College of Chemistry and Material Science

Hubei University Wuhan 430062 China

+Huazhong University of Science and Technology Wuhan 430074 China>

关键词：钽铌酸钾薄膜 , null , null

Study on Orientation Growth of KTa_0.65Nb_0.35O₃ Thin Films on SrTiO₃ (111) Substrates

WANG Shimin , WANG Longhai , ZHANG Gangsheng , ZHAO Jianhong , ZHANG Duanming , LI Zuoyi , ZHANG Tianjin

Keywords： potassium tantalate niobate thin films, orientation growth, formation and decomposition of perovskite structure KTN , 取向生长 , KTN的形成和分解

以乙酸钾、乙醇钽、乙醇铌为前驱体，在SrTiO₃（111）衬底上取向生长了KTa_0.65Nb_0.35O₃薄膜.通过DTA-TG分析，确定了预烧工艺，发现钙钛矿结构KTN在高温（＞950℃）下可分解，产生缺钾中间相K₂Ta₄O₁₁．单层凝胶膜预热处理（＞450℃），多层覆盖，慢速升降温（1～2℃／min），750℃保温2h，可得到晶粒大小分布均匀，平均直径约0．2μm、致密的薄膜．升高温度、延长时间，晶粒长大，甚至团聚，产生气孔、裂纹，烧结温度应控制在950℃以下．

Oriented KTa_0.65Nb_0.35O₃ thin films were grown on SrTiO₃ (111) single crystal substrates by means of potassium acetate, tantalum ethoxide and niobium ethoxide as
precursors. The presintering technological conditions were established by DTA--TGA. It was discovered that perovskite structure KTN would decompose above 950℃ to form
potassium-deficient phase K₂Ta₄O₁₁. The homogeneous, high-density, 0.2μm grain size perovskite structure KTN thin films were obtained when each layer presintered above
450℃ for 1h, multilayers sintered at 750℃ for 2h, and all of heating and cooling rate was 1～2℃/min. The film grain size increased with sintering temperature
and time, at high temperature, aggregate of grains, holes and crackles formed on the film surface. The sintering temperature must be controlled under 950℃.

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