利用等离子体增强热丝化学气相沉积,用CH4和H2为反应气体,在不同CH4浓度的情况下制备了纳米金刚石颗粒,并用高分辨扫描电子显微镜和显微Raman光谱仪对它们进行了表征.结果表明,纳米金刚石颗粒随CH4浓度的增大而增大.结合与CH4-H2等离子体有关的结果,对纳米金刚石颗粒随CH4浓度的生长进行了分析和讨论.
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