利用液相电化学方法,以乙酰丙酮铁的甲醇溶液为碳源,在单晶硅表面制备了铁-非晶碳磁性纳米复合薄膜.通过扫描电子显微镜、X射线衍射、X射线光电子能谱和Raman光谱技术分析了薄膜组成、形貌和结构.结果表明:Fe掺杂的非晶碳膜为含有Fe、Fe3O4纳米晶和非晶碳基的复合结构.和未掺杂非晶碳膜相比,Fe掺杂的薄膜具有更高的sp2碳含量和无序度.磁滞回线显示Fe掺杂的薄膜具有软磁特性,沿薄膜表面方向为易磁化方向.
Using liquid phase electrochemical deposition method,the Fe doped amorphous carbon composite films with magnetic properties were deposited on single crystal silicon substrates in the methanol solution mixed Iron (Ⅲ) 2,4-pentanedionate.The chemical composition,morphology and microstructure of the films were analyzed by SEM,XRD,XPS and Raman technique.The results show that the Fe doped film exhibits nanocomposite structure including nanocrystallites Fe,Fe3O4 and amorphous carbon matrix.Compared with pure amorphous carbon film,the Fe doped film has the higher sp2 carbon content and the greater disorder.Magnetic hysteresis loop indicates that the composite film is soft magnetic property with easy magnetization direction parallel to the film plane.
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