纳米晶体Ti表面磁控溅射SiC薄膜的干摩擦学性能

稀有金属材料与工程, 2011, 40(6): 991-994.

纳米晶体Ti表面磁控溅射SiC薄膜的干摩擦学性能

许晓静 ^1, , 郝欣妮 ^2, , 陆树显 ^3, , 卓刘成 ^4, , 夏登福 ^5,

1.江苏大学,江苏,镇江,212013

2.江苏大学,江苏,镇江,212013

3.江苏大学,江苏,镇江,212013

4.江苏大学,江苏,镇江,212013

5.江苏大学,江苏,镇江,212013

基金项目: 江苏省教育厅摩擦学重点实验室基金(Kjsmcx06005) 江苏大学优秀学术青年骨干培养对象基金(1211110001)

关键词：纳米晶体钛基材 , 薄膜 , 摩擦磨损 , 磁控溅射

Dry Tribological Properties of Magnetron Sputtered SiC Films on Nanocrystalline Titanium Substrate

采用室温磁控溅射技术在纳米晶体钛(剧烈塑性变形制备)表面制备出碳化硅(SiC)薄膜,研究SiC薄膜的组织结构、纳米压痕行为和摩擦磨损性能.结果表明:SiC薄膜具有纳米尺度"畴"特征的表面形貌、高含量Si-C键、与基材间具有明显且呈梯度的元素扩散、低的纳米硬度(10.62 GPa)、低的弹性模量(83.34 GPa)和高的硬模比(0.128).在1.96 N载荷、氮化硅球(半径为2 mm)为对摩件、室温空气条件下,其磨损速率为10<'-5>mm<'3>·m<'-1>·N<'-1>级、摩擦系数约为0.162,磨损后薄膜不出现裂纹和剥落.

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材料期刊网

纳米晶体Ti表面磁控溅射SiC薄膜的干摩擦学性能

Dry Tribological Properties of Magnetron Sputtered SiC Films on Nanocrystalline Titanium Substrate

参考文献