阐述了利用喷雾热解技术在硅片衬底上生长锰掺杂铝酸锌光致发光纳米薄膜的方法.该纳米薄膜制备方法简单、经济和环保.通过XRD分析测试结果表明,当三氯化铝在氢氧化锌中的含量高于20%,衬底温度高于100℃时,在衬底上会形成ZnAl2O4-ZnO纳米复合薄膜;该复合薄膜经0.1mol/L盐酸处理后,形成ZnAl2O4尖晶石矿纳米薄膜.研究了金属锰离子掺杂ZnAl2O4纳米薄膜的光致发光性能,荧光光谱实验结果表明,这种利用喷雾热解技术生长的掺锰ZnAl2O4尖晶石纳米薄膜,在525nm附近有一发光带,为Mn2+的4T1(4G)6A1(6S)跃迁.
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