用化学腐蚀方法织构多晶硅片表面,通过调整制程参数获得腐蚀温度分别为12℃、17℃、22℃、29℃的4组样品,利用扫描电子显微镜(SEM)分析化学腐蚀后多晶硅片表面状态,通过反射谱的测试,分析了多晶硅片表面陷光效果,研究腐蚀温度与后续各制程参数的关系.结果表明:随着腐蚀温度的升高,绒面反射率、镀膜膜厚逐渐升高,开路电压、填充因子逐渐增大,短路电流逐渐减小,最终确定了最佳的腐蚀温度.
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