自组装制备是一种常用的三维光子晶体制备方法,在制备光子晶体过程中影响薄膜质量的因素较多.本研究对原始的双基片垂直沉积法进行了一定的改进,控制光照强弱、蒸发速度快慢等条件,沉积了不同的SiO2光子晶体薄膜样品.通过与单基片垂直沉积法得到的薄膜样品进行比较,得到了双基片垂直沉积法沉积光子晶体薄膜样品的最优实验条件.
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