采用脉冲激光沉积方法在Si(100)衬底上制备了类金刚石薄膜,利用椭圆偏振光谱,拉曼光谱及X光电子能谱研究了衬底温度对薄膜的结构和光学性质的影响.结果表明较低衬底温度制备的薄膜的光学常数具有典型的类金刚石特征.衬底温度的升高导致了薄膜的有序化,使得薄膜的sp3键成分改变,从而影响了薄膜的光学常数.衬底温度过高,导致薄膜严重石墨化,表面粗糙度增加,不利于制备高质量类金刚石薄膜.
参考文献
| [1] | Leng YX.;Chen JY.;Yang P.;Sun H.;Wan GJ.;Huang N. .Mechanical properties and platelet adhesion behavior of diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition[J].Surface Science: A Journal Devoted to the Physics and Chemistry of Interfaces,2003(2):177-184. |
| [2] | Balon F;Stolojan V;Silva SRP;Michalka M;Kromka A .Diamond-like carbon thin films for high-temperature applications prepared by filtered pulsed laser deposition[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2005(1/3):163-167. |
| [3] | Chen JY.;Wang LP.;Fu KY.;Huang N.;Leng Y.;Leng YX.;Yang P.;Wang J. Wan GJ.;Sun H.;Tian XB.;Chu PK. .Blood compatibility and sp(3)/sp(2) contents of diamond-like carbon (DLC) synthesized by plasma immersion ion implantation-deposition[J].Surface & Coatings Technology,2002(1/3):289-294. |
| [4] | P.D. Maguirea;J.A. McLaughlin;T.I.T. Okpalugoa .Mechanical stability, corrosion performance and bioresponse of amorphous diamond-like carbon for medical stents and guidewires[J].Diamond and Related Materials,2005(8):1277-1288. |
| [5] | Azzam N M A;Bashara N M.Ellipsometry and Polarized Light[M].Amsterdam:North-Holland Press,1977 |
| [6] | Jellison G E Jr;Modine F A .[J].Applied Physics Letters,1996,69(03):371-373. |
| [7] | J. O. Orwa;I. Andrienko;J. L. Peng;S. Prawer;Y. B. Zhang;S. P. Lau .Thermally induced sp~(2) clustering in tetrahedral amorphous carbon (ta-C) films[J].Journal of Applied Physics,2004(11):6286-6297. |
| [8] | Shroder R E;Nemanich R J;Glass J T .[J].Physical Review B:Condensed Matter,1990,41:3738-3745. |
| [9] | Merkulov VI;Lannin JS;Munro CH;Asher SA;Veerasamy VS;Milne WI;UNIV CAMBRIDGE DEPT ENGN CAMBRIDGE CB2 1PZ ENGLAND. .uv studies of tetrahedral bonding in diamondlike amorphous carbon[J].Physical review letters,1997(25):4869-4872. |
| [10] | Galvan, D;Pei, YT;De Hosson, JTM;Cavaleiro, A .Determination of the sp(3) C content of a-C films through EELS analysis in the TEM[J].Surface & Coatings Technology,2005(1/4):739-743. |
| [11] | Schāfer J;Ristein J;Graupner R et al.[J].Physical Review B:Condensed Matter,1996,53:7762-7774. |
| [12] | Rajnish Sharma;Panwar O S;Sushil Kumar et al.[J].Journal of Applied Physics,2003,220:313-320. |
| [13] | J(a)ger H U;Belov A Y .[J].Physical Review B:Condensed Matter,2003,68:024201(1)-024201(13. |
| [14] | Lifshitz Y;Kasi S R;Rabalais J W et al.[J].Physical Review B:Condensed Matter,1990,41(15):10468-10480. |
| [15] | Lifshitz Y;Lempert G D;Grossman E .[J].Physical Review Letters,1994,72:2753-2756. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%