采用粉末溶胶法和快速层层退火工艺,在Pt/Ti/SiO2/Si基片上制备了钙锶铋钛(CSBT)陶瓷厚膜.研究了纳米晶粉体加入量对钙锶铋钛陶瓷厚膜结构及性能的影响.结果表明:纳米晶粉体加入量在较宽的范围内可以制备出高质量的钙锶铋钛厚膜,厚膜的显微结构及铁电性能对粉末的加入量比较敏感,适当的加入量有利于促使厚膜晶粒的a轴择优取向,从而有利于膜的铁电性能.当粉末加入量为7.5 g/100 mL时,钙锶铋钛陶瓷厚膜晶粒出现a轴择优取向,剩余极化和矫顽场强分别为6.3 μC/cm2和57 kV/cm,具有较高的应用价值.
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