采用溶胶-凝胶法在普通载玻片上制备出c轴择优取向的ZnO: Al(ZAO)透明导电薄膜,研究了溶胶pH值对其结构、表面形貌、电学和光学性能的影响.结果表明:随着pH值的降低晶粒尺寸增大;当溶胶pH值从8.4降低到6.8时,薄膜的电阻率先降低而后略有升高,当pH值为7.2时其电阻率达到最小值2.6×10-3 Ω·cm,进一步分析表明,溶胶pH值的变化影响了薄膜晶界散射,而后者又使载流子迁移率发生了变化;薄膜的透光率在可见光部分随着pH值的降低而升高,而禁带宽度则从3.36 eV降到3.32 eV.
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