采用石英晶体微天平（QCM）反应性监测方法研究了铜在臭氧环境中的腐蚀初期行为及机理。通过监测不同臭氧浓度、不同温度下表面镀铜石英晶振片的频率变化，得到铜在臭氧环境中的腐蚀动力学曲线，并据此计算了腐蚀速度等参数，进一步推测铜在臭氧中的腐蚀机理。结果表明，在特定腐蚀条件下，镀铜石英晶振片的频率随时间变化呈下降趋势，说明晶振片表面的铜与腐蚀介质发生反应生成腐蚀产物，导致镀铜石英晶振片表面质量增加，引起频率下降。臭氧浓度和温度对铜的腐蚀行为有着不同程度的影响，随着臭氧浓度的增大和反应温度的升高，铜的腐蚀速率不断增大。
The corrosion behavior and mechanism of copper exposed to ozone at initial stage were investigated by using a quartz crystal microbalance(QCM). Through monitoring the frequency changes of copper-electrodeposited quartz crystal at different ozone concentrations and different temperatures, the corrosion kinetic curves were obtained. According to these curves, the corrosion rate and other related parameters were calculated and the corrosion mechanism involved was put forward. The results showed that, under specified corrosion conditions, the frequency change of the copper-electrodeposited quartz crystal decreased with the time. This indicated that the copper on the quartz crystal surface reacted with the corrosion medium to form corrosion products, which led to an increase of the surface mass of the quartz crystal and a decrease in the frequency. Ozone concentration and temperature can exercise an influence on the corrosion behavior of copper in various degrees. With the increase of ozone concentration and reaction temperature, the corrosion rate of copper gradually increased.
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