掺杂浓度对Al-F共掺杂ZnO透明导电薄膜性能的影响

材料热处理学报, 2008, 29(5): 31-35.

掺杂浓度对Al-F共掺杂ZnO透明导电薄膜性能的影响

吕珺 ^1, , 周丽萍 ^2, , 汪冬梅 ^3, , 吴玉程 ^4, , 郑治祥 ^5,

1.合肥工业大学材料科学与工程学院,安徽合肥,230009

2.合肥工业大学材料科学与工程学院,安徽合肥,230009

3.合肥工业大学材料科学与工程学院,安徽合肥,230009

4.合肥工业大学材料科学与工程学院,安徽合肥,230009

5.合肥工业大学材料科学与工程学院,安徽合肥,230009

基金项目: 合肥工业大学中青年科技创新群体专项(103-037016)

关键词： ZnO薄膜 , 溶胶-凝胶 , Al-F共掺杂 , 掺杂浓度 , 光电性能

Influence of dopant concentration on properties of Al-F co-doped ZnO thin films

通过溶胶-凝胶法制备了不同Al-F掺杂浓度的ZnO薄膜,研究了薄膜的晶体结构、表面形貌、电阻率和透光性随着掺杂浓度的变化情况.结果表明:制备的ZnO:F:Al薄膜具有高度的C轴择优取向性,薄膜表面平整、晶粒均匀致密.当Al3+和F-的掺杂浓度皆为0.75at%时,薄膜的平均品粒尺寸最大为43.8nm;导电性能最好,电阻率可低至1.02×10-2Ω·cm;在可见光范围内薄膜的平均透过率超过90%,吸收边出现明显的蓝移现象.

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材料期刊网

掺杂浓度对Al-F共掺杂ZnO透明导电薄膜性能的影响

Influence of dopant concentration on properties of Al-F co-doped ZnO thin films

参考文献