以(CH3COO)2Zn·2H2O和AlCl3·6H2O为前驱物,以普通玻璃为基底利用溶胶-凝胶旋转涂膜法制备AZO薄膜.采用X射线衍射仪、扫描电子显微镜、紫外-可见分光光度计、四探针电阻测试仪等对AZO薄膜的物相组分、表面形貌、透射率和方块电阻进行测量与表征,并研究了热处理温度和掺铝量对AZO薄膜的结构和光电性能的影响.结果表明:AZO薄膜的结构和光电性能与不同的热处理温度和掺铝量有关,实验得到了最佳的工艺条件为热处理温度为500℃,热处理时间为60 min,掺Al溶度为1mol％,镀膜层数为8层.
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