采用sol-gel方法在Pt/Ti/SiO2/Si衬底上制备出纯相铁酸铋薄膜.采用热分析方法研究了凝胶的化学变化和析晶过程.分析讨论了退火温度对薄膜的结构和形貌的影响.并用XRD、SEM等手段对样品在不同温度条件退火处理后的薄膜相和形貌进行了分析.在800℃时采用层层退火方式,有效抑制Fe价态转化,从而降低了电子波动引发的氧空位数目,制备出纯铁相高电阻率的BiFeO3铁电薄膜,并观测到饱和电滞回线,其Ps和Pr分别为6.9μC/cm2和2.8μC/Cm2.
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