构造三维蒙特卡罗模型,研究了六边形基底薄膜生长的过程.在模型中针对每个原子考虑了原子沉积,原子扩散及原子脱附三个动力学过程,并认为这三个过程是相互独立的,即在同一计算步长中三个过程依据各自的概率发生.经过生长过程可视化的结果表明,薄膜原子之间的相互作用能、基底温度和沉积速率对薄膜的生长方式有显著的影响.这一结论得到了实验的验证.
The morphology of thin film growth has been investigated using 3D Monte Carlo model.Three kinds of dynamic process, i.e. adsorption, diffusion and revaporation are considered independently.Each of the three processes will happen in one Monte Carlo step according to their rate. In the processes of deposition and diffusion, the finial position of atom is the Non-Null position of the next layer. The results show that the thin film growth mode is determined by interaction energy between two atoms of thin film, deposition rate and temperature.
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