以单丁基三氯化锡(MBTC)和SbCl3为反应原料,采用常压化学气相沉积法(APCVD法)在不同的基板温度下制备Sb掺杂SnO2薄膜,用XRD、SEM表征了薄膜的结构和形貌,通过测量薄膜的方块电阻、载流子浓度、霍尔(Hall)系数、紫外可见光谱等性质,详细研究了基板温度对薄膜结构和光电性能的影响.实验表明550℃以上制备的样品为多晶薄膜,并保持四方相金红石型结构;在650℃下沉积的薄膜具有最低的方块电阻值,为72Ω/□;在可见光区域薄膜透射率和反射率随着基板温度的提高均有所下降.
参考文献
| [1] | Rockenkerger J;Tischer M;Haase M et al.[J].Journal of Chemical Physics,2000,112:4296-4504. |
| [2] | Adolf G;Christopher H .[J].Solar Energy Materials and Solar Cells,2000,62:1-19. |
| [3] | Ishiara Y;Hirai T;Sakurai C et al.[J].Thin Solid Films,2002,411:50-55. |
| [4] | Kim JS.;Friend RH.;Johansson N.;Salaneck WR.;Daik R. Feast WJ.;Cacialli F.;Granstrom M. .Indium-tin oxide treatments for single- and double-layer polymeric light-emitting diodes: The relation between the anode physical, chemical, and morphological properties and the device performance[J].Journal of Applied Physics,1998(12):6859-6870. |
| [5] | Richard J. McCurdy .Successful implementation methods of atmospheric CVD on a glass manufacturing line[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(1/2):66-72. |
| [6] | Janos S .[J].Journal of Applied Surface Science,2002,185:161-171. |
| [7] | Hammarberg E.;Roos A. .Antireflection treatment of low-emitting glazings for energy efficient windows with high visible transmittance[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):222-226. |
| [8] | Ruske M;Brauer G;Szczyrbowski J et al.[J].Thin Solid Films,1999,351:146-150. |
| [9] | Mizuhashi M .[J].Journal of Non-Crystalline Solids,1980,38:329. |
| [10] | Thangaraju B. .Structural and electrical studies on highly conducting spray deposited fluorine and antimony doped SnO2 thin films from SnCl2 precursor[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1/2):71-78. |
| [11] | Elangovan E;Ramamurthi K .[J].JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS,2003,5:415-420. |
| [12] | Maruyama T;Ikuta Y .[J].Solar Energy Materials and Solar Cells,1992,28:209. |
| [13] | Arias A C;Roman L S;Kugler T et al.[J].Thin Solid Films,2000,371:201-206. |
| [14] | Roger J A;Terrier C;Chatelon J P .[J].Thin Solid Films,1997,295:95-100. |
| [15] | Varghese O K;Malhotra L K .[J].Journal of Applied Physics,2000,87:7457-7465. |
| [16] | Shanthi E .[J].Journal of Applied Physics,1980,51:6243. |
| [17] | Kaneko S.;Murakami K.;Okuya M.;Yagi I. .Thermal decomposition of di-n-butyltin(IV) diacetate as a precursor for the spray pyrolysis deposition of oriented SnO2 thin films[J].Solid state ionics,2001(Special Issue SI):463-470. |
| [18] | Paraguay F D;Estrada W L;Acosta D R N et al.[J].Thin Solid Films,1999,350:192-202. |
| [19] | Korotcenkov G;Brinzari V;Schwank J et al.[J].Sensors and Actuators B:Chemical,2001,77:244-252. |
| [20] | Seeger K;徐乐;钱建业.半导体物理学[M].北京:人民教育出版社,1980 |
| [21] | 郭玉忠,王剑华,黄瑞安,王贵青.掺杂SnO2透明导电薄膜电学及光学性能研究[J].无机材料学报,2002(01):131-138. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%