FeCoNiB软磁薄膜微波电磁性能研究

稀有金属材料与工程, 2011, 40(10): 1840-1843.

FeCoNiB软磁薄膜微波电磁性能研究

邱景 ^1, , 龚荣洲 ^2, , 冯则坤 ^3, , 廖健生 ^4,

1.华中科技大学,湖北武汉430074

2.华中科技大学,湖北武汉430074

3.华中科技大学,湖北武汉430074

4.华中科技大学,湖北武汉430074

基金项目: 高等学校博士学科点专项科研基金(20090142110004)

关键词：磁性薄膜 , 微波电磁性能 , 复磁导率 , 电阻率

Microwave Electromagnetic Characteristics of FeCoNiB Soft Magnetic Thin Films

采用射频磁控溅射工艺,制备了一系列(Fe40Co40B20)1-xNix(x为原子分数)磁性薄膜,研究了样品在微波频段下的电磁性能.结果表明,通过调整Ni含量及合适的工艺参数可有效调控薄膜的微结构和电磁性能,且在(Fe40Co40B20)0.91Ni9薄膜样品中获得了优良的微波性能和高电阻率.其饱和磁化强度4πMs达到2.21 T,复磁导率实部μ1在0.5～3 GHz频率范围内大于195,铁磁共振频率fFMR达到3.16 GHz,电阻率也达到276μΩ·cm.该薄膜可应用于GHz频段下电磁器件的设计中.

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FeCoNiB软磁薄膜微波电磁性能研究

Microwave Electromagnetic Characteristics of FeCoNiB Soft Magnetic Thin Films

参考文献