ZnO薄膜是继GaN材料之后的另一种具有应用前景的直接宽带隙半导体材料.针对目前对ZnO薄膜结构的分析,综述了ZnO薄膜结构表征的常用方法,着重分析了XRD在ZnO薄膜结构方面的应用.
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