碳纳米管具有良好的电子发射特性,成为理想的场致发射阴极材料,碳纳米管阵列制备研究是碳纳米管平板显示应用的前提.介绍了碳纳米管阴极阵列制备技术如丝网印制法、CVD原位生长法、光刻法和自组织法等研究与进展,并从薄膜残留去除、CNTs膜微结构改变及sp3缺陷增加等方面概述了目前CNTs场发射性能优化的进展,指出了目前存在的问题并作了简单分析.
参考文献
| [1] | Yap H Y;Ramaker B;Sumant A V .Growth of mechanically fixed and isolated vertically aligned carbon nanotubes and nanofibers by DC plasma-enhanced hot filament chemical vapor deposition[J].Diamond and Related Materials,2006,15:1622. |
| [2] | Kjetil Gjerde;Tommy Schurmann;Ian Bu .Integration of carbon nanotubes with controllable inclination angle into microsystems[J].Carbon: An International Journal Sponsored by the American Carbon Society,2006(14):3030-3036. |
| [3] | Sung Hoon Lim;Kyu Chang Park .controlled density of vertically aligned carbon nanotubes in a triode plasma chemical vapor deposition system[J].Thin Solid Films,2006,515:1380. |
| [4] | Lee N S;Chung D S;Han I T.Application of carbon nano-tubes to field emission displays[J].Diamond and Related Materials,2001(10):265. |
| [5] | Sun-Kyu Hwang;Soo-Hwan Jeong .Packing density control of carbon nanotube emitters in an anodic alum oxide nanotemplate on a Si wafer[J].Science Direct Diamond &Relate Matchrials,2006,15:1501. |
| [6] | Lee S H;Alegaonkar P S;Han J H et al.Carbon nanotubes growth in AlPO4-5zeolites:Evidence dependent field emission characteristics[J].Diamond and Related Materials,2006,15:1795. |
| [7] | Aijun Yin;Hope Chik;Xu Jimmy.Postgrowth processing of carbon nanotube arrays enabling new functionallities and applications field emission characteristics[J].Diamond and Related Materials,2006(05):1148. |
| [8] | Noriaki Sano;Masakazu Naito .Enhanced field emission properties of consisting of Fe-core carbon nanotubes prepared under magnetic field[J].Science Direct Carbon,2006,294:1118. |
| [9] | Jo S H;Tu Y;Huang Z P et al.Correlation of field emission andsurface micros tructure of vertically aligned carbon nanotubes[J].Applied Physics Letters,2004,84:413. |
| [10] | 郭靖阳,陈泽祥.基于PECVD的碳纳米管生长及其场致发射特性[J].真空电子技术,2006(02):1-4. |
| [11] | Groning O.;Emmenegger C.;Groning P.;Schlapbach L.;Kuttel OM. .Field emission properties of carbon nanotubes[J].Journal of Vacuum Science & Technology, B. Microelectronics and Nanometer Structures: Processing, Measurement and Phenomena,2000(2):665-678. |
| [12] | 陈淑霞,顾长志,李海钧,吕宪义,金曾孙.硅尖与高质量碳纳米管混合物的场发射性能[J].真空电子技术,2006(01):62-64,8. |
| [13] | Chen Po Lin;Chang Jun Kai;Kuo Cheng Tzu et al.Field emission of carbon nanotubes on anodic aluminum oxide template with controlled tube density[J].Applied Physics Letters,2005,86:123111. |
| [14] | Min K J;Bong C W;Sung L N et al.Field emission from carbon nanotubes for displays[J].Diamond and Related Materials,2000,9:1184. |
| [15] | 王琪琨,朱钧,朱长纯.涂敷法制备的碳纳米管阴极的场发射研究[J].电子器件,2005(02):239-241,244. |
| [16] | 朱长纯,史永胜,李琰.基于半导体工艺制备碳纳米管阴极图形阵列[J].半导体光电,2003(06):441-443. |
| [17] | Choi Y C;Shin Y M;Bae D J et al.Patterned growth andfield emission properties of vertically aligned carbon nanotubes[J].Diamond and Related Materials,2001,10:1457. |
| [18] | Klinke C.;Kern K.;Bonard JM. .Comparative study of the catalytic growth of patterned carbon nanotube films[J].Surface Science: A Journal Devoted to the Physics and Chemistry of Interfaces,2001(1/2):195-201. |
| [19] | Huang, Shaoming;Mau, Albert W.H.;Dai, Liming .Patterned growth and contact transfer of well-aligned carbon nanotube films[J].The journal of physical chemistry. B, Materials, Surfaces, Interfaces & Biophysical,1999(21):4223-4227. |
| [20] | Fan S S;Chapline M G;Franhlin N R et al.Self-oriented regular arrays of carbon nanotubes and their field emission properties[J].Science,1999,283(22):512. |
| [21] | Yu W J;Cho Y S;Choi G S et al.A stable high power carbon nanotube field-emitter device[J].Diamond and Related Materials,2004,13:1017. |
| [22] | Jung J E;Jin Y W;Choi J H et al.Fabrication of triodetype field emission displays with high-density carbon-nanotubeemitter arrays[J].PHYSICA B,2002,323:71. |
| [23] | Cho YR.;Song YH.;Kang SY.;Hwang CS.;Jung MY.;Kim DH.;Lee SK.;Uhm HS.;Cho KI.;Lee JH. .Photolithography-based carbon nanotubes patterning for field emission displays[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2001(2):128-132. |
| [24] | Room-temperature fabrication of high-resolution carbon nanotube field-emission cathodes by self-assembly[J].Applied physics letters,2003(15):2521-2523. |
| [25] | 曾凡光,朱长纯,刘兴辉,刘卫华.用机械破碎方法提高印刷碳纳米管薄膜的场发射性能[J].西安交通大学学报,2005(08):863-866. |
| [26] | Yong C. Kim;K. H. Sohn;Y. M. Cho;Eun H. Yoo .Vertical alignment of printed carbon nanotubes by multiple field emission cycles[J].Applied physics letters,2004(26):5350-5352. |
| [27] | 张继华,冯涛,于伟东,王曦,柳襄怀.粒子轰击对碳纳米管微结构和场发射性能的影响[J].液晶与显示,2004(03):163-167. |
| [28] | Rochanachirapar W;Murakami K et al.Influenceof gas atmosphere during laser surface treatment of CNTs cathode[J].Journal of Vacuum Science and Technology B:Microelectronics and Nanometer Structures,2005,23(02):762. |
| [29] | L. Nilsson;O. Groening;C. Emmenegger .Scanning field emission from patterned carbon nanotube films[J].Applied physics letters,2000(15):2071-2073. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%