采用射频磁控溅射技术在石英衬底上制备了掺杂浓度为0.5％(原子分数)的ZnO∶Sn(TZO)薄膜,研究了不同衬底温度下薄膜的结构、形貌、电学和光学的性能.研究发现,TZO薄膜沿着C轴择优生长,在400℃时结晶度最好,最低电阻率为2.619×10-2Ω·cm,在可见光范围内具有较好的透光率.
参考文献
| [1] | Aranovich J A;Golmayo D et al.Photovoltaic properties of ZnO/CdTe heterojunctions prepared by spray pyrolysis[J].Journal of Applied Physics,1980,51(08):4260. |
| [2] | Zu P;Tang Z K et al.Ultravlolet spontaneous and stimulated emissions form ZnO microcrystallite thin films at room temperature[J].Solid State Communications,1997,103(08):59. |
| [3] | 王文文,刁训刚,王峥,王天民.直流磁控溅射ZnO：Al薄膜的光电和红外发射特性[J].北京航空航天大学学报,2005(02):236-241. |
| [4] | Shan F K;Yu Y S .Band gap energy of pure and Al-doped ZnO thin films[J].Journal of the European Ceramic Society,2004,24(06):1869. |
| [5] | 徐艺滨,杜国同,刘维峰,杨天鹏,王新胜.ZnO：Al透明导电薄膜的制备及其特性分析[J].人工晶体学报,2006(03):569-572. |
| [6] | Wang MH;Hu KA;Zhao BY;Zhang NF .Electrical characteristics and stability of low voltage ZnO varistors doped with Al[J].Materials Chemistry and Physics,2006(1):142-146. |
| [7] | Nakahata H;Higaki K;Hachigo A et al.High frequency surface acoustic wave filter using ZnO/Diamond/Si structure[J].Journal of Applied Physics,1994,33(01):324. |
| [8] | B. S. Chun;H. C. Wu;M. Abid;I. C. Chu;S. Serrano-Guisan;I. V. Shvets;Daniel. S. Choi .The effect of deposition power on the electrical properties of Al-doped zinc oxide thin films[J].Applied physics letters,2010(8):082109-1-082109-3. |
| [9] | Parag Banerjee;Won-Jae Lee;Ki-Ryeol Bae;Sang Bok Lee;Gary W. Rubloff .Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films[J].Journal of Applied Physics,2010(4):043504-1-043504-7. |
| [10] | Byeong-Guk Kim;Jeong-Yeon Kim;Seok-Jin Lee;Jae-Hwan Park;Dong-Gun Lim;Mun-Gi Park .Structural, electrical and optical properties of Ga-doped ZnO films on PET substrate[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2010(3):1063-1067. |
| [11] | Wu, F.;Fang, L.;Pan, Y.J.;Zhou, K.;Huang, Q.L.;Kong, C.Y. .Effect of substrate temperature on the structural, electrical and optical properties of ZnO:Ga thin films prepared by RF magnetron sputtering[J].Physica, E. Low-dimensional systems & nanostructures,2010(1):228-234. |
| [12] | Peng L P;Fang L et al.Characteristics of ZnO:In thin films prepared by RF rnagnetron sputtering[J].Physica E:Low-dimensional Syst Nanostructures,2009,41(10):1819. |
| [13] | Kang D H;Song I et al.Effect of Ga/In ratio on the optical and electrical properties of GaInZnO thin films grown on SiO2/Si substrate[J].Applied Physics Letters,2007,91(09):1910. |
| [14] | Das A K et al.Effect of Si doping on electrical and optical properties of ZnO thin films grown by sequential pulsed laser deposition[J].Journal of Physics D:Applied Physics,2009,42:165405. |
| [15] | Lee JH.;Park BO. .Transparent conducting ZnO : Al, In and Sn thin films deposited by the sol-gel method[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):94-99. |
| [16] | Chien-Yie Tsay;Hua-Chi Cheng;Yen-Ting Tung;Wei-Hsing Tuan;Chung-Kwei Lin .Effect Of Sn-doped On Microstructural And Optical Properties Of Zno Thinfilms Deposited By Sol-gel Method[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(3):1032-1036. |
| [17] | López-Ponce E;Costa-Kr(a)mer J L et al.Growth and characterization of Sn doped ZnO thin films by PLD[J].Physical Status Solidi A Applied Research,2006,203(06):7. |
| [18] | Holmelund E.;Schou J.;Tougaard S.;Larsen NB. .Pure and Sn-doped ZnO films produced by pulsed laser deposition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2002(0):467-471. |
| [19] | Bougrine A;Addou M;Kachouane A;Bernede JC;Morsli M .Effect of tin incorporation on physicochemical properties of ZnO films prepared by spray pyrolysis[J].Materials Chemistry and Physics,2005(2/3):247-252. |
| [20] | Bilgin V;Kose S;Atay F;Akyuz I .The effect of Sn concentration on some physical properties of zinc oxide films prepared by ultrasonic spray pyrolysis[J].Journal of Materials Science,2005(8):1909-1915. |
| [21] | 黄树来,马瑾,刘晓梅,马洪磊,孙征,张德恒.ZnO-SnO2透明导电膜的低温制备及性质[J].半导体学报,2004(01):56-59. |
| [22] | J.H. Ko;I.H. Kim;D. Kim;K.S. Lee;T.S. Lee;B. Cheong;W.M. Kim .Transparent and conducting Zn-Sn-O thin films prepared by combinatorial approach[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2007(18):7398-7403. |
| [23] | Cullity B D.Elements of X-ray difffactions[M].London:Addition-Wesley,1959 |
| [24] | Fang GJ.;Li DJ.;Yao BL. .Effect of vacuum annealing on the properties of transparent conductive AZO thin films prepared by DC magnetron sputtering[J].Physica Status Solidi, A. Applied Research,2002(1):139-152. |
| [25] | Wang Q P;Sun Z;Du J et al.Structural and optical properties of P-Ga codoping ZnO thin films deposited by magentron sputtering[J].Optical Materials,2007,29(11):1358. |
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