采用微波等离子体化学气相沉积法,在预镀陶瓷过渡层的硫化锌衬底上沉积金刚石膜2在以前的实验中,我们发现在陶瓷过渡层上沉积金刚石膜极其困难,但采用金刚石诱导形核方法后,我们已经在过渡层/硫化锌试样表面获得了很小面积(约1mm宽的环状区域)的金刚石形核.本文对前期的诱导形核工作进行了一定改进,目前已经使形核生长范围大大增加,沉积面积超过原来10倍.此外,本文对金刚石/过渡层/硫化锌试样的红外透过特性以及金刚石膜质量等进行了评价.
参考文献
| [1] | Li Jingqi;Zhang Jihua;Guo Wantu.[J].Diamond and Related Materials,2002(11):753-756. |
| [2] | Miller A J;Reece D M.[J].Diamond and Related Materials,1997(06):386-389. |
| [3] | Harris D C .[J].SPIE,1995,2552:325-335. |
| [4] | McGeoch S.P. .Coatings for the protection of diamond in high-temperature environments[J].Diamond and Related Materials,1999(2 Mar):916-919. |
| [5] | Ulcznski M J;Wright B;Reinhard D K.[J].Diamond and Related Materials,1998(07):1639-1646. |
| [6] | Tossel D A;Costello M C;Brierley C J .[J].SPIE,1992,1760:268-278. |
| [7] | Costello M C;Tossell D A.[J].Diamond and Related Materials,1994(03):1137-1141. |
| [8] | Brierley C J;Costello M C;Hudson M D et al.[J].SPIE,1994,2286:307-315. |
| [9] | Korenstein R;Goldman L;Hallock R et al.[J].SPIE,1997,3060:181-195. |
| [10] | GAO Xu-hui,LU Fan-xiu,TONG Yu-mei,GUO Hui-Bin,TANG Wei-zhong,LI Cheng-ming,CHEN Guang-chao,YU Huai-Zhi,CHENG Hong-Fan,YANG Hai.Induced Nucleation of Diamond Films on ZnS Substrates Precoated with Ceramic Interlayer[J].中国物理快报（英文版）,2004(02):406-409. |
| [11] | 吕反修,高旭辉,郭会斌,陈广超,李成明,唐伟忠,佟玉梅,余怀之,程宏范,杨海.在预涂陶瓷过渡层的多谱段ZnS衬底上沉积金刚石膜的探索研究[J].人工晶体学报,2004(01):105-108. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%