通过巯基链转移支化聚合法,以4-乙烯基苄硫醇(VBT)为支化单体,丙烯酸正丁酯(BA)、苯乙烯(St)、丙烯酸(AA)为共聚单体,偶氮二异丁腈(AIBN)为引发剂,丙二醇甲醚醋酸酯(PMA)为溶剂,合成了HBPs.利用甲基丙烯酸缩水甘油酯(GMA)环氧基与HBP羧基的反应,向HBP中引入双键制备了具有碱溶性和光固化特性的G-HBP.采用FT-IR、1 H-NMR、DSC、凝胶色谱(GPC)-激光光散射(LS)-示差黏度(DV)三检测仪表征了聚合物的结构及性能,验证了其超支化结构;将合成的G--HBP用作负性光致抗蚀剂的主体树脂,测试了光致抗蚀剂显影成像过程参数.结果表明,显影时间为40 s,去膜时间为30 s,感度级数为7级.抗蚀剂性能优异,分辨率可达到40 μm.
参考文献
| [1] | Konwar, U.;Karak, N.;Mandal, M. .Vegetable oil based highly branched polyester/clay silver nanocomposites as antimicrobial surface coating materials[J].Progress in Organic Coatings: An International Review Journal,2010(4):265-273. |
| [2] | I. Larraza;C. Peinado;C. Abrusci .Hyperbranched polymers as clay surface modifiers for UV-cured nanocomposites with antimicrobial activity[J].Journal of Photochemistry and Photobiology, A. Chemistry,2011(1):46-54. |
| [3] | Tian, W.;Fan, X.;Kong, J.;Liu, Y.;Liu, T.;Huang, Y. .Novel supramolecular system of amphiphilic hyperbranched polymer with β-cyclodextrin and hyperbranched topography cavities: Synthesis and selective encapsulation[J].Polymer: The International Journal for the Science and Technology of Polymers,2010(12):2556-2564. |
| [4] | 代鹏,江金强,王丽娜,宗奕吾,赵涛,刘晓亚.巯基链转移聚合法制备超支化聚甲基丙烯酸-β-羟乙酯[J].应用化工,2009(07):945-949. |
| [5] | Schlenoff JB.;Xu H.;Wen LQ.;Li M.;Dharia JR. .ADSORPTION OF THIOL-CONTAINING COPOLYMERS ONTO GOLD[J].Macromolecules,1995(12):4290-4295. |
| [6] | Farah AA;Alvarez-Puebla RA;Fenniri H .Chemically stable silver nanoparticle-crosslinked polymer microspheres[J].Journal of Colloid and Interface Science,2008(2):572-576. |
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