利用x射线衍射(xRD)和慢正电子束分析(SPBA)技术研究高温退火后含He钛膜的微观结构和钛膜内He相关缺陷的演化.XRD分析表明,高温退火后Ti和Si在高温下发生反应形成稳定的多晶TiSi2化合物,He原子的掺入会影响TiSi2晶体的择优取向,而对TiSi2晶粒尺寸的影响较小.SPBA结果表明,室温下,钛膜内的缺陷浓度或尺寸会随着掺He浓度的增加而增大;高温退火后,当He浓度小于5％(原子分数,下同)时(除2％外),钛膜内的He相关缺陷浓度随着He浓度增加相应地增加.当He浓度增加到14％时,高温会使较高浓度的He原子、He-空位复合体以及小He泡迁移聚集形成一些尺寸较大He泡,而较大He泡周围与He相关的小尺寸缺陷的浓度则会发生相应地减少.
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