由于铸造多晶硅生长工艺特点,硅晶体自发成核以(111)晶向为主,同时Fe杂质的分布在铸锭的头部和尾部高、中间低;硅片少子寿命呈现头部和尾部低、中间高的分布趋势.大量杂质分布使得晶锭底部和顶部的材料难以通过后续吸杂和钝化工艺来改善少子寿命.本文通过特殊的铸锭诱导吸杂技术,诱导产生较强的(220)晶向,有效的减低铸锭,头部和尾部Fe的含馈(其中头部和尾部分别降低了16.6%和22.0%),硅片头部和尾部分别提高了41.9%和11.9%.
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