以Pt(111)/Ti/SiO_2/Si为基片,采用溶胶凝胶法,通过紫外光辐照钕掺杂钛酸铋(Bi_(4-x)Nd_xTi_3O_(12), x=0.25, 0.75)胶体,分别采用电泳沉积和甩胶沉积制备薄膜,并对比了制备的薄膜质量.通过差热-热重分析(DSC-TG)、X射线衍射(XRD)、原子力显微镜(AFM)等技术手段对Sol-Gel法制备的BNT薄膜进行了表征.研究结果表明,经紫外光辐照和电泳沉积制备的Bi_(4-x)Nd_xTi_3O_(12) (x=0.25, 0.75) 薄膜于300 ℃煅烧有机物,500 ℃随炉热处理,可得到均匀致密且(117)择优取向的钙钛矿相BNT薄膜.
The films of neodymium-doped Bi_4Ti_3O_(12)(Bi_(4-x)Nd_xTi_3O_(12), x=0.25, 0.75, BNT) were synthesized by sol-gel using UV-light irradiation on Pt(111)/Ti/SiO_2/Si substrate, then they were investigated by differential scanning calorimetry-thermogravimetry (DSC-TG), atomic force microscope(AFM) and X-ray diffraction (XRD) technology. The results show that the BNT thin films are uniform and dense. After thin films were deposited using electrophoresis and UV-irradiation , annealed at 300 ℃, and then crystallized at 500 ℃for 30 min, pure perovskite phases were obtained. XRD indicated that BNT thin film had (117) predominate orientation.
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