采用溶胶-凝胶(Sol-gel)法和旋涂法在单晶硅片表面制备了5％(摩尔分数)Er3+掺杂的Yb2Ti2O7薄膜.采用X射线衍射仪(XRD)和扫描电子显微镜(SEM)对薄膜的相结构和表面及截面形貌进行了表征,通过荧光光谱仪检测了薄膜的上转换发光特性.结果表明:Ep+掺杂的Yb2Ti2O7薄膜为单一面心立方Yb2Ti2O7相结构,薄膜表面较光滑平整,颗粒尺寸约为80 nm.976 nm半导体激光器(LD)激发Er3+掺杂的Yb2Ti2O7薄膜获得了较强的绿色、红色和红外上转换发光,分别对应于Er3+的2H11/2/4S3/2→4I15/2、4 F9/2→4I15/2和4 S3/2 →4I13/2跃迁.Er3+掺杂Yb2Ti2O7薄膜的绿色和红色上转换发光均为双光子吸收过程.Er3+掺杂Yb2Ti2O7薄膜和粉末的上转换发光光谱还出现了绿色和红色上转换发光强度的变化.
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