YIG薄膜制备方法研究

材料导报, 2003, 17(1): 21-26.

1.浙江大学硅重点实验室,杭州,310027

2.浙江大学硅重点实验室,杭州,310027

3.浙江大学硅重点实验室,杭州,310027

4.浙江大学硅重点实验室,杭州,310027

基金项目: 国家自然科学基金(60077006)

Research on methods of formation of YIG films

就工艺,测试结果,性能等方面综述了钇铁石榴石YIG(Yttrium Iron Garnet)薄膜的制备方法,包括Sol-Gel、CVD、溅射、PLD、LPE等.从YIG复合薄膜的制备、基片选择等角度,提出通过提高YIG薄膜制品的磁光性能从而改善磁光器件整体性能的新思路.

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