用热化学气相沉积(CVD)技术,用乙炔为碳源,氮气为载气,氢气为还原气体,氨气为刻蚀气体,在单晶硅上制备出定向竹节型结构碳纳米管薄膜.用透射电镜(TEM),扫描电镜(SEM)的X衍射能量色散能谱仪(EDS)和X射线衍射仪(XRD)分析碳纳米管的精细结构,成分和晶型及结晶度,并对制备的碳纳米管的生长机制进行分析和推测.结果表明:在生长碳纳米管的过程中起催化作用的是金属镍颗粒而不是碳化镍,催化剂颗粒呈不同的形貌存在碳纳米管顶部,并遵循顶端生长方式.
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