采用超声喷雾热解法,在玻璃基底上一步合成了In2S3薄膜.研究了衬底温度对In2S3薄膜的结构、表面形貌、电学和光学性能影响.结果表明:所制备的In2S3薄膜均具有沿(220)面择优取向生长特性且无其他杂相,衬底温度对薄膜的均匀性、致密度、结晶程度均有明显影响,并因此影响薄膜的光电性能.薄膜的导电件随着衬底温度的升高迅速增强,但足在衬底温度为350℃时有所降低.衬底温度为300℃所制备的薄膜在可见光区透光率最高达到90%以上,禁带宽度达到2.43 eV.
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