光敏性ZrO2-SiO2有机-无机杂化光学薄膜

稀有金属材料与工程, 2008, 37(z2): 244-247.

光敏性ZrO2-SiO2有机-无机杂化光学薄膜

徐键 ^1, , 董建峰 ^2, , 杨任尔 ^3, , 徐清波 ^4,

1.宁波大学信息科学与工程学院,浙江,宁波,315211

2.宁波大学信息科学与工程学院,浙江,宁波,315211

3.宁波大学信息科学与工程学院,浙江,宁波,315211

4.宁波大学信息科学与工程学院,浙江,宁波,315211

基金项目: 教育部留学回国人员科研启动基金科技部国际科技合作计划(2006DFA52910) 浙江省科技厅资助项目(2006R10038)

关键词：溶胶-凝胶 , 光学薄膜 , 有机-无机杂化材料 , 光敏材料 , ZrO2-SiO2

Photosensitive ZrO2-SiO2 Organic-Inorganic Hybrid Optical Films

以锆和硅的醇盐为原料,合成了平面波导用紫外光敏性ZrO2-SiO2有机-无机杂化溶胶-凝胶光学材料,用旋涂法在单晶硅片上制备了其光学薄膜.用棱镜耦合仪、FTIR红外光谱仪和原子力显微镜(AFM)等测试了薄膜的厚度和折射率、结构基团和薄膜表面粗糙度,并用棱镜耦合法测试了其平板型光波导的光传输损耗.结果表明:该杂化材料可用于制备厚达约20 μm、折射率在1.45～1.50间可调、表面粗糙度小(约0.2 nm)的均匀光学薄膜;以这些杂化薄膜为导光层和衬底层的平板型光波导的光传输损耗小于1dB/cm.

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材料期刊网

光敏性ZrO2-SiO2有机-无机杂化光学薄膜

Photosensitive ZrO2-SiO2 Organic-Inorganic Hybrid Optical Films

参考文献