介绍了一种适合于制备Si3N4陶瓷微细部件的微细制备技术.该技术主要包括Si粉的预烧结成形和微型加工以及反应烧结等三部分,结合了Si粉预烧结体的可加工性和Si3N4反应烧结所具有的近净尺寸成形特点,具有制备Si3N4陶瓷三维微细部件的优势.本研究利用该技术成功地制备了直径5mm、厚度1.2mm、叶片厚度大约70μm的Si3N4陶瓷微型转子.
This paper introduces a novel process for the microfabrication of Si3N4 ceramic microcomponents, which mainly consists of pre-sintering of Si powder
compacts, micromachining of pre-sintered Si performs and reaction sintering of the micromachined Si performs. The present process has its high potential for
Si3N4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of Si3N4
reaction sintering. Using this process, we fabricated a reaction-sintered Si3N4 ceramic micro-turbine rotor that has a 5mm diameter, 1.2mm thickness, and whose blades are as thin as 70μm.
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